[22p-E204-1~13] 6.3 酸化物エレクトロニクス

▼ [22p-E204-8] Phase Structural Modification of Solution-Processed Barium Titanate/Polysiloxane Nanocomposite for Memory Application

〇(D)Aimi Safaruddin¹、Juan Paolo S. Bermundo¹、Mutsunori Uenuma¹、Atsuko Yamamoto²、Yukaru Uraoka¹ (1.NAIST、2.MERCK)

キーワード：capacitor, BaTiO3, Ferroelectric

Barium titanate (BTO) is commonly known to have a large memory window and high program/erase speeds with low operating voltage. This study mainly investigates the hysteresis characteristics of tetragonal BTO incorporated into polysiloxane (PSX) polymer by varying the films curing temperature. C-V measurement of metal oxide semiconductor devices revealed that BTOPSX films cured below BTO curie temperature (T_C) exhibited wide counter clockwise hysteresis of 3.6 V associated to polarization of tetragonal BTO nanoparticles. The transition to cubic crystal structure above the T_C (120 °C) deteriorate the hysteresis characteristics to 0.3 V as the BTO nanoparticles undergo phase transition from tetragonal to cubic crystal structure which no longer retain the BTO ferroelectric properties.