[24p-E204-1~10] 6.2 カーボン系薄膜

△ [24p-E204-10] Evaluation of Electrical Resistance of amorphous carbon films with Substrate Dependence Under Mechanical Pressure

〇(M2)Azmi Muhamad¹、Ayumu Takada¹、Ryuto Hirawata¹、Naoki Yasuno¹、Shuji Obata¹、Noboru Miyata²、Miyazaki Tsukasa²、Yasuharu Ohgoe¹ (1.Tokyo Denki University、2.CROSS, Neutron Science and Technology)

キーワード：Electrical resistivity, amorphous carbon films, PET

In this study, we evaluated the substrate dependence of the electrical resistivity of amorphous carbon films under compression. a-C:H and Sputtered a-C (:H) films showed a change in film structure under compression, and also showed lower resistivity on PET substrates with six-membered rings. These results indicate that the electrical resistance of DLC under compression is dependent on the substrate.