2023年第70回応用物理学会春季学術講演会

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13 半導体 » 13.6 ナノ構造・量子現象・ナノ量子デバイス

[15p-D411-1~14] 13.6 ナノ構造・量子現象・ナノ量子デバイス

2023年3月15日(水) 13:30 〜 17:30 D411 (11号館)

中岡 俊裕(上智大)、太田 竜一(NTT)、長谷川 尊之(大阪工大)

16:30 〜 16:45

[15p-D411-11] Diethylzinc passivation of InAs surface quantum dots

〇(DC)Hanif Mohammadi1、Ronel Roca1、Hyunju Lee1、Yoshio Ohshita1、Naotaka Iwata1、Itaru Kamiya1 (1.Toyota tech. inst.)

キーワード:InAs surface quantum dots, Passivation, Ligand exchange self clean up

InAs surface quantum dots (SQDs) have attracted wide attention for potential applications in optoelectronic devices. However, the presence of surface non-radiative recombination sites (SNRS), i.e., surface states and native oxides, suppresses the photoluminescence (PL). Although conventional wet chemical passivation, e.g., by (NH4)2S, reduces the SNRS and enhances PL, it etches the SQDs and significantly blueshifts the PL emission. Here, we show the PL intensity enhancement of molecular beam epitaxy (MBE)-grown InAs SQDs by atomic layer deposition (ALD)-diethylzinc (DEZ) passivation, which suppresses SQD size shrinkage and PL emission blueshift.