13:15 〜 13:30
▲ [16p-A408-2] High-temperature diamond MEMS magnetic sensor with on-chip actuation and sensing
キーワード：Single-crystal diamond, MEMS, Magnetic sensor
Single-crystal diamond (SCD) hosts outstanding mechanical strength, thermal conductivity, and chemical inertness, which make it a promising material for high-performance and high-reliability MEMS devices. We developed a facile and smart method for the mass production of SCD N/MEMS resonators with high reproducibility via the ion-implantation assisted lift-off technique. In addition, the Q factor up to 1 million of as-produced SCD resonators was achieved through the atomic scale etching in an oxygen ambient. Based on the principle of ΔE effect, the SCD resonator coupling with a magneto-strictive FeGa film offers a great platform for magnetic transducing with high-performance and high-reliability, especially for high-temperature application regimes. Multi-layer structures of SCD MEMS resonators with magneto-strictive thin films were developed for magnetic sensing from room-temperature to high-temperature, which were superior to the as-reported high-temperature magnetic sensors. The magnetic transducing performances of the SCD-based resonators were enhanced and tailored through the interface engineering with various interfaces.
In the present work, we propose and demonstrate an integrated on-chip SCD-based resonator through using a self-sensing and actuation scheme for high-temperature magnetic sensing. The on-chip FeGa/Ti/SCD MEMS magnetic transducers were electrically actuated and the resonance vibration was simultaneously electrically readout. The magnetic transducer fulfills magnetic transducing with high thermal-stability up to 500℃, showing a high-sensitivity of 3.2 Hz/mT from 25℃ to 500℃ and a noise level ~nT/√Hz at 300℃. The prototype scheme of a magnetic transducer array based on on-chip FeGa/Ti/SCD MEMS magnetic transducers was achieved. This work provides a promising paradigm for developing highly-integrated MEMS magnetic transducers for high-temperature applications.
In the present work, we propose and demonstrate an integrated on-chip SCD-based resonator through using a self-sensing and actuation scheme for high-temperature magnetic sensing. The on-chip FeGa/Ti/SCD MEMS magnetic transducers were electrically actuated and the resonance vibration was simultaneously electrically readout. The magnetic transducer fulfills magnetic transducing with high thermal-stability up to 500℃, showing a high-sensitivity of 3.2 Hz/mT from 25℃ to 500℃ and a noise level ~nT/√Hz at 300℃. The prototype scheme of a magnetic transducer array based on on-chip FeGa/Ti/SCD MEMS magnetic transducers was achieved. This work provides a promising paradigm for developing highly-integrated MEMS magnetic transducers for high-temperature applications.