The 70th JSAP Spring Meeting 2023

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Poster presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

[16p-PA08-1~18] 6.3 Oxide electronics

Thu. Mar 16, 2023 4:00 PM - 6:00 PM PA08 (Poster)

4:00 PM - 6:00 PM

[16p-PA08-16] Epitaxial growth of V2O3 by reactive RF magnetron sputtering

〇Shinji Horai1, Daisuke Kan1, Yuichi Shimakawa1 (1.ICR, Kyoto Univ.)

Keywords:reactive RF sputtering, Epitaxial growth, functional oxides