1:30 PM - 1:35 PM
[17p-E502-1] Opening Remarks
Keywords:Integrated MEMS
Presentation information
Symposium (Oral)
Symposium » Trends and Prospects of MEMS and Microfabrication Technologies Contributing to the With-Covid-19 Era
[17p-E502-1~9] Trends and Prospects of MEMS and Microfabrication Technologies Contributing to the With-Covid-19 Era
Fri. Mar 17, 2023 1:30 PM - 5:00 PM E502 (Building No. 12)
Masahide Goto(NHK), Toshihiro Takeshita(産総研), Toshishige Shimamura(NTT)