The 70th JSAP Spring Meeting 2023

Toshihiro Takeshita

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Chairperson, etc.

Fri. Mar 17, 2023 1:30 PM - 5:00 PM E502 (Building No. 12)

  • Symposium (Oral)
  • | Symposium
  • | Trends and Prospects of MEMS and Microfabrication Technologies Contributing to the With-Covid-19 Era

[17p-E502-1~9] Trends and Prospects of MEMS and Microfabrication Technologies Contributing to the With-Covid-19 Era

Masahide Goto(NHK), Toshihiro Takeshita(産総研), Toshishige Shimamura(NTT)