[2Bp01-10] Surface Analysis/Applied Surface Science/Evaluation Technique (ASS)

[2Bp01(招待講演)] Super-resolution Imaging Using Functional Thin Films

*Wataru Inami^1,2, Yoshimasa Kawata^1,2 (1. Shizuoka University, 2. CREST)

A microscope with higher spatial resolution has been developed using a converging electron beam and a functional thin film. The electron beam is highly convergent and can form a probe of several nanometers. The functional thin films are used to convert sample quantities into quantities that can be imaged with an electron beam. For example, by converting the electron beam into light with a fluorescent thin film, optical information about the sample can be obtained. An ion concentration distribution can be measured by converting the charge distribution on the functional thin film into depletion layer thickness. By using highly a convergent electron beam and a functional thin film, we can observe various specimens and develop a super-resolution microscope with spatial resolution exceeding the diffraction limit of light.