[3Fp01-10] Latest trends of sealing inspections and leak testing: Vacuum Technologies Division's Session

[3Fp10] Visualization of micro-level leak position of filters and vacuum seals

*Akiko N. Itakura¹, Naoya Miyauchi¹, Hajime Yoshida² (1. National Institute for Materials Science, 2. National Institute of Advanced Industrial Science and Technology)

Operando hydrogen microscope (OHM) is an original hydrogen visualization equipment using electron stimulated desorption (ESD) method. In the equipment, permeated hydrogen atoms through the sample membrane are ionized by incident electron on the sample surface, desorbed into UHV environment and detected. By using the electron source of a scanning electron microscope (SEM) as the excitation source for ESD, we visualize the surface hydrogen distribution from the hydrogen desorption position. In the paper, we used OHM to visualize hydrogen leak position in standard conductance element (SCE), which is a filter of open type standard leak. Sintered stainless steel is used as a leak medium.