Crystallization of In<sub>2</sub>O<sub>3</sub>-based amorphous thin films and its influence on electrical properties

Junjun Jia

16:00 〜 18:00

[D2-PR14-44] Crystallization of In₂O₃-based amorphous thin films and its influence on electrical properties

*Junjun Jia¹, Shimpei Iwasaki², Shin-ichi Nakamura², Toshihiro Okajima³, Yuzo Shigesato² (1. Waseda University (Japan), 2. Aoyama Gakuin University (Japan), 3. Aichi Synchrotron Radiation Center (Japan))

キーワード：Amorphous , Crystallization, in-situ synchrotron XRD

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講演情報

[D2-PR14] Slot 14

[D2-PR14-44] Crystallization of In₂O₃-based amorphous thin films and its influence on electrical properties

講演情報

[D2-PR14] Slot 14

[D2-PR14-44] Crystallization of In2O3-based amorphous thin films and its influence on electrical properties

[D2-PR14-44] Crystallization of In₂O₃-based amorphous thin films and its influence on electrical properties