Oral Session 6

[OPTM-6-03] Spectroscopic Ellipsometry Study on Aluminium-Doped Zinc Oxide Thin Films Prepared via DC Magnetron Sputtering and HiPIMS.

Donyawan Chittinan¹, Tossaporn Lertvanithphol², Kittikhun Seawsakul³, Prayoon Songsiriritthigul³, Phitsanu Poolcharuansin⁴, Mati Horprathum², *Prathan Buranasiri¹ (1. King Mongkut's Institute of Technology Ladkrabang, 2. National Electronics and Computer Technology Center, National Science and Technology Development Agency , 3. Suranaree University of Technology, 4. Mahasarakham University)