Plasma Conference 2017

Presentation information

Poster Presentation

[24P] Poster 4

Fri. Nov 24, 2017 2:00 PM - 4:00 PM Poster (1F Exhibition Hall)

2:00 PM - 4:00 PM

[24P-32] Fabrication of titanium nitride films with isolated nanocolumnar structures by glancing-angle reactive sputtering

Ryusei Takamura1, Daiki Sato1, *Yasushi Inoue1, Osamu Takai2 (1. Chiba Inst. Technol., 2. Kanto Gakuin Univ.)

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