SISPAD2023

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Oral

[Session 4] Process Simulation

Wed. Sep 27, 2023 3:20 PM - 5:00 PM Hall B

Chair: Nobuhiko Nakano (Keio Univ.), Junichi Hattori (AIST)

3:40 PM - 4:00 PM

[Session_4-02] A Boltzmann Transport Equation Model for Substrate Damage During Focused Helium Ion Beam Fabrication of Nanostructures

*Qi Li1, Ye Chen1, Yan Xing1 (1. Southeast University)

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