[Session 7] Traps and Defects

[Session_7-01] 【Invited】Quantum Mechanical Modeling Techniques for High-Performance Low-k Amorphous Material Engineering: a Showcase for aBN

Blanka Magyari-Köpe¹, Hans Hsu², *Jeff Wu² (1. Taiwan Semiconductor Manufacturing Company Technology Inc., San Jose, CA, USA, 2. Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW)