SISPAD2023

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Oral

[Session 7] Traps and Defects

Thu. Sep 28, 2023 1:00 PM - 2:50 PM Hall A

Chair: Kenichiro Sonoda (Renesas), Shingo Sato (Kansai Univ.)

2:10 PM - 2:30 PM

[Session_7-04] Intrinsic Electron Trapping in Amorphous Silicon Nitride (a-Si3N4:H)

*Christoph Wilhelmer1,2, Dominic Waldhoer2, Diego Milardovich2, Michael Waltl1, Tibor Grasser2 (1. Christian Doppler Lab. for Single-Defect Spectroscopy in Semiconductor Devices at the Inst. for Microelectronics, 2. Inst. for Microelectronics, Technische Univ. Wien)

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