[E-7] MEMS and Advanced Metallization II

[E-7-02] Fabrication and Characterization of Through-X Via (TXV) for Smart Skin Display

〇Tadaaki Hoshi¹, Yuki Susumago¹, Liu Chang¹, Atsushi Shinoda², Hisashi Kino³, Tetsu Tanaka^1,3, Takafumi Fukushima^1,3 (1. Dept. of Mechanical Systems Engineering, Graduate School of Engineering, Univ. of Tohoku (Japan), 2. Dept. of Mechanical and Aerospace Engineering, School of Engineering, Univ of Tohoku (Japan), 3. Dept. of Biomedical Engineering, Graduate School of Biomedical Engineering, Univ. of Tohoku (Japan))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.E-7-02