[E-7] MEMS and Advanced Metallization II

[E-7-03] Piezoresistive Strain Sensors Based On Gold Nanoparticle Deposits On PDMS Substrates For Highly Sensitive Human Pulse Sensing

〇Wei-Rong Yang¹, Yu-Shun Su¹, Jenn-Ming Song¹, Watson Kuo¹, Shien-Der Tzeng², Kiyokazu Yasuda³ (1. National Chung Hsing University (Taiwan), 2. National Dong Hwa University (Taiwan), 3. Osaka University (Japan))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.E-7-03

In this study, highly-sensitive piezoresistive strain sen-sors based on gold nanoparticle thin films deposited on a stretchable PDMS substrate by centrifugation were de-veloped to measure arterial pulse waveform. The gauge factors of nanoparticle thin film sensors can be opti-mized up to 419 in tensile mode and 260 in compressive mode. It has been demonstrated that nanoparticle thin film sensors on PDMS substrates were successfully ap-plied to sense arterial pulses at human body.