2023 International Conference on Solid State Devices and Materials

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Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[C-3] Advanced process of oxide semiconductors

2023年9月7日(木) 09:00 〜 10:15 Room C (221, Bldg. 2)

Session Chairs: Keisuke Ide (Tokyo Tech), Kaoru Toko (Univ. of Tsukuba)

09:30 〜 09:45

[C-3-02] High-Performance Submicron IGZO TFTs Fabricated with a Maximum Temperature of 110 ℃

Horng-Chih Lin1, ○Po-Jung Lin1, Yu-Chi Chen1, Ping-Che Liu1, Chien-Wei Chen2, Chi-Chung Kei2, Pei-Wen Li1 (1. National Yang Ming Chiao Tung University (Taiwan), 2. Taiwan Instrument Research Institute (Taiwan))

https://doi.org/10.7567/SSDM.2023.C-3-02

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