2023 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-3] Ferroelectric Devices

Thu. Sep 7, 2023 9:00 AM - 10:00 AM Room F (224, Bldg. 2)

Session Chairs: Pin Su (NYCU), Shibun Tsuda (Renesas Electronics Corp.)

9:30 AM - 9:45 AM

[F-3-03] Impact of the dielectric layer on Wake-up Effect of HZO-based Thin Films

Min Liao1, Junshuai Chai1, Jinjuan Xiang2, Kai Han3, Yanrong Wang4, Hao Xu1, Xiaolei Wang1, Jing Zhang4, Wenwu Wang1 (1. Institute of Microelectronics Chinese Academy of Sciences (China), 2. Beijing Superstring Academy of Memory Tech. (China), 3. Weifang Univ. (China), 4. North China Univ.of Tech. (China))

https://doi.org/10.7567/SSDM.2023.F-3-03

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