Crystallinity and Composition of Sc / Si:P System for Advanced Contact Applications

Bert Pollefliet

doi:https://doi.org/10.7567/SSDM.2023.F-5-02

09:30 〜 09:45

[F-5-02] Crystallinity and Composition of Sc / Si:P System for Advanced Contact Applications

^○Bert Pollefliet^1,2, Clement Porret², Jean-Luc Everaert², Kiroubanand Sankaran², Xiaoyu Piao², Erik Rosseel², Thierry Conard², Andrea Impagnatiello², Yosuke Shimura², Andriy Hikavyy², Roger Loo², André Vantomme¹, Clement Merckling^1,2 (1. KU Leuven (Belgium), 2. imec (Belgium))

https://doi.org/10.7567/SSDM.2023.F-5-02

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講演情報

[F-5] Advanced CMOS: Process Technology

[F-5-02] Crystallinity and Composition of Sc / Si:P System for Advanced Contact Applications

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