2023 International Conference on Solid State Devices and Materials

講演情報

印刷

Short Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[SO-PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

2023年9月7日(木) 13:30 〜 14:00 Room F (224, Bldg. 2)

Session Chairs: Hidetoshi Oishi (Sony Semiconductor Solutions Corp.), Keisuke Yamamoto (Kyushu Univ)

13:30 〜 13:32

[SO-PS-01-01] Amorphous Si-rich Mo silicide films for advanced source/drain contacts

○Naoya Okada1, Noriyuki Uchida1, Toshihiko Kanayama1 (1. AIST (Japan))

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