2023 International Conference on Solid State Devices and Materials

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Short Oral Presentation

02: Advanced and Emerging Memories / New Applications

[SO-PS-02] 02: Advanced and Emerging Memories / New Applications

2023年9月7日(木) 13:30 〜 14:18 Room K (234, Bldg. 2)

Session Chairs: Atsushi Himeno (Panasonic Holdings Corporation), Ming-Hsiu Lee (Macronix International Co., Ltd)

13:38 〜 13:40

[SO-PS-02-05] Improved Stable Memory Window of the Germanium Ferroelectric Field-Effect Transistor with ZrO2-HfO2-ZrO2 Superlattice Gate Dielectric

Kaixuan Li1, Yue Peng1, wenwu xiao2,1, Yan Liu1, Genquan Han1, Yue Hao1 (1. Wide Bandgap Semiconductor Technology Disciplines State Key Laboratory, School of Microelectronics, Xidian University (China), 2. Xi’an UniIC Semiconductors Company Ltd. (China))

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