11:05 〜 11:30
[AMD6-2(Invited)] Development of high mobility top gate IGZO-TFT for Automotive OLED display.
Oxide-TFT, High mobility, Top gate, Reliability, OLED
High performance IGZO-TFT with top gate structure was developed for automotive OLED display backplane. By optimizing the process conditions, we achieved the mobility of 32 cm2/Vs with enhanced threshold voltage. The PBT/NBT/NBIT reliability are good enough to use in OLED application. The prototype 12.3” flexible automotive OLED display was successfully demonstrated.