Silicon Graphoepitaxy

Michael W. GEIS; Dale C. FLANDERS; Donald J. SILVERSMITH; Dimitri A. ANTONIADIS; Henry I. SMITH

doi:https://doi.org/10.7567/SSDM.1980.A-2-2

1980 Conference on Solid State Devices

Aug 26, 1980 - Aug 27, 1980
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-2-2] Silicon Graphoepitaxy

Michael W. GEIS, Dale C. FLANDERS, Donald J. SILVERSMITH, Dimitri A. ANTONIADIS, Henry I. SMITH (1.Lincoln Laboratory, Massachusetts Institute of Technology)

https://doi.org/10.7567/SSDM.1980.A-2-2

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