[C-9-3] Leakage Currents Reduction of Poly-Si TFT's by Two Step Annealing

T. Aoyama, Y. Mochizuki, G. Kawachi, S. Oikawa, K. Miyata (1.Hitachi Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1990.C-9-3