A 64MBit Stacked-Trench-Capacitor Cell

Lothar RISCH; Wolfgang ROSNER; Wilfried HANSCH; Virinder GREWAL; Andreas SPITZER; Josef WINNERL; Reinhard TIELERT

doi:https://doi.org/10.7567/SSDM.1990.S-CI-8

1990 International Conference on Solid State Devices and Materials

Aug 22, 1990 - Aug 24, 1990
Hotel Sendai Plaza, Sendai, Japan

[S-CI-8] A 64MBit Stacked-Trench-Capacitor Cell

Lothar RISCH, Wolfgang ROSNER, Wilfried HANSCH, Virinder GREWAL, Andreas SPITZER, Josef WINNERL, Reinhard TIELERT (1.Siemens AG, Corporate Research & Development)

https://doi.org/10.7567/SSDM.1990.S-CI-8

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