[A-2-2] Solid-Phase Nucleation Control of Amorphous Si by Step-Structure of Substrate Surface and Local P-Doping

M. Moniwa、K. Kusukawa、M. Ohkura、E. Takeda (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1992.A-2-2