Formation and Characterization of Epitaxial Rutile Thin Films on Si Substrate

Myung Bok LEE; Masashi KAWASAKI; Mamoru YOSHIMOTO; Hideomi KOINUMA; Bum Ki  MOON; Hiroshi ISHIWARA

doi:https://doi.org/10.7567/SSDM.1994.C-7-1

[C-7-1] Formation and Characterization of Epitaxial Rutile Thin Films on Si Substrate

Myung Bok LEE、Masashi KAWASAKI、Mamoru YOSHIMOTO、Hideomi KOINUMA、Bum Ki MOON、Hiroshi ISHIWARA (1.Research Laboratory of Engineering Materials, Tokyo Institute of Technology、2.Precision and Intelligence Laboratory, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1994.C-7-1

1994 International Conference on Solid State Devices and Materials

[C-7-1] Formation and Characterization of Epitaxial Rutile Thin Films on Si Substrate