[C-8-1] New Spectroscopic Method for Determination of Energy Distribution of Interface States for MOS Devices with Ultra-Thin Oxide Layers

Hikaru KOBAYASHI, Yoshiyuki YAMASHITA, Toshio MORI, Yoshihiro NAKATO Kyung-Ho PARK, Yasushiro NISHIOKA (1.Research Center for Photoenergetics of Organic Materials, and Department of Chemistry, Faculty of Engineering Science, Osaka University, 2.Tsukuba Research & Development Center, Texas Instruments Japan)

https://doi.org/10.7567/SSDM.1994.C-8-1