[C-8-1] New Spectroscopic Method for Determination of Energy Distribution of Interface States for MOS Devices with Ultra-Thin Oxide Layers

Hikaru KOBAYASHI、Yoshiyuki YAMASHITA、Toshio MORI、Yoshihiro NAKATO Kyung-Ho PARK、Yasushiro NISHIOKA (1.Research Center for Photoenergetics of Organic Materials, and Department of Chemistry, Faculty of Engineering Science, Osaka University、2.Tsukuba Research & Development Center, Texas Instruments Japan)

https://doi.org/10.7567/SSDM.1994.C-8-1