[PA-4-7] Ultra Short and Narrow Channel Si MOSFETs with Advanced SEG Isolation Fabricated by Ultra High Vacuum CVD

Atsushi HORI, Takehiro HIRAI, Mitsuo TANAKA (1.Semiconductor Research Center, Matsushita Electric Ind. Co.)

https://doi.org/10.7567/SSDM.1994.PA-4-7