Low Permittivity Organic Dielectrics for Multilevel Interconnection in High Speed ULSIs

Yoshio HOMMA; Takeshi FURUSAWA; Kikuo KUSUKAWA; Shigeo MORIYAMA Hiroyuki MORISHIMA; Hidetada SATO

doi:https://doi.org/10.7567/SSDM.1995.S-I-5-1

1995 International Conference on Solid State Devices and Materials

1995年8月21日〜 1995年8月24日
International House, Osaka, Japan

[S-I-5-1] Low Permittivity Organic Dielectrics for Multilevel Interconnection in High Speed ULSIs

Yoshio HOMMA、Takeshi FURUSAWA、Kikuo KUSUKAWA、Shigeo MORIYAMA Hiroyuki MORISHIMA、Hidetada SATO (1.Central Research Laboratory, Hitachi Ltd.、2.Hitachi Chemical Co. Ltd.)

https://doi.org/10.7567/SSDM.1995.S-I-5-1

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