[D-3-4] Low Temperature(≦550℃) CMOS Thin-Film Transistors in RTCVD Poly-Si0.88Ge0.12 Films

Seo-Kyu Lee, Seong-Min Choe, Chang-Geun Ahn, Wook-Jin Chung, Young-Kyu Kwon, B. K. Kang, Ohyun Kim (1.Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, 2.Research Institute of Industrial Science and Technology, 3.LG Semiconductor Co., Ltd.)

https://doi.org/10.7567/SSDM.1996.D-3-4