[PD-3-5] Highly Oxidation-Resistant TiN Barrier Layers for Ferroelectric Capacitors

Yuichi MATSUI, Keiko KUSHIDA, Hiroshi MIKI, Kazuyoshi TORII, Yoshihisa FUJISAKI (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1996.PD-3-5