[C-12-1] Simulation of 2-Dimensional Hole Gas for PMOS Devices with Phosphorus Pile-Up

Hiroshi Fujioka、Kanta Ono、Yoshiyuki Sato、Chenming Hu、Masaharu Oshima (1.Department of Applied Chemistry, University of Tokyo、2.NTT Laboratories、3.University of California at Berkeley)

https://doi.org/10.7567/SSDM.1997.C-12-1