The Japan Society of Applied Physics

[D-10-8] Electrical Properties of Metal-Insulator-Semiconductor (MIS) Interface and MISFETs Employing Hydrogenated Diamond Film Surface

Young Yun、Tetsuro Maki、Hiroyuki Tanaka、Takeshi Kobayashi (1.Department of Electrical Engineering, Faculty of engineering Science, Osaka University)

https://doi.org/10.7567/SSDM.1997.D-10-8