[A-8-1] On Shallow Trench Isolation for Deep Submission CMOS Technologies

Amitava Chatterjee, M. Nandakumar, Stan Ashburn, Vikas Gupta, Siang P. Kwok, Ih-Chin Chen (1.Silicon Technology Development, Texas Instruments)

https://doi.org/10.7567/SSDM.1998.A-8-1