[D-7-5] Annealing Behavior of Low-Temperature-Deposited SrTiO3 Capacitor

Mitsuru Nishitsuji、Kaoru Inoue、Akiyoshi Tamura、Tsuyoshi Tanaka、Daisuke Ueda (1.Electronics Research Laboratory, Matsushita Electronics Corporation)

https://doi.org/10.7567/SSDM.1998.D-7-5