[A-6-1] Manufacturable 0.13 μm DRAM Technology for 512M DDR DRAM

Yong-Hae Kim, Dae-Young Kim, Jae-Beom Park, Seung-Ho Yi, Byung-Seop Hong, Dong-Gyu Yim, Jun-Ki Kim, Jong-Moo Choi, Dong-Duk Lee, Gyu-Han Yoon (1.TG-1/P1 Memory Research Development Division, Hynix Semiconductor)

https://doi.org/10.7567/SSDM.2001.A-6-1