[C-1-1] Mobility in high-κ dielectric based field effect transistors
L-A Ragnarsson、W. Tsai、A. Kerber、P.J. Chen、E. Cartier、L. Pantisano、S. De Gendt、M. Heyns
(1.IMEC、2.Intel Corp.、3.Infineon、4.Texas Instruments、5.IBM)
https://doi.org/10.7567/SSDM.2003.C-1-1
