[A-2-5] Charge Trapping Characteristics of Hafnium Based High-κDielectrics with Various Metal Electrodes

Chadwin D. Young、Gennadi Bersuker、Huang-Chun Wen、George A. Brown、Prashant Majhi (1.International SEMATECH (ISMT)、2.Phillips Assignee)

https://doi.org/10.7567/SSDM.2004.A-2-5