[P2-14] Dependence of Analog and Digital Performances on Mechanical Film Stress of ILD Layer in Nano-Scale CMOSFETs

S. H. Park、H. H. Ji、Y. G. Kim、H. D. Lee、S. H Baek、K. C. Kim、B. S. Song、H. K. Bae、H. S. Lee、Y. S. Kang、D. B. Kim、J. W. Park (1.System IC PD Center, Hynix Semiconductor Inc.、2.Dept. of Electronics Engineering, Chungnam National University)

https://doi.org/10.7567/SSDM.2004.P2-14