[B-9-2] Reliability and Memory Characteristics of Sequential Laterally Solidified LTPS TFT with a ONO Stack Gate Dielectric

Ssu-I Hsieh、Ya-Chin King、Hung-Tse Chen、Yu-Cheng Chen、Chi-Lin Chen、Jia-Xing Lin (1.Microelectronics Lab., STAR Group, Department of Electrical Engineering National Tsing-Hua University、2.,Electronics Research and Service Organization Industrial Technology Research Institute)

https://doi.org/10.7567/SSDM.2005.B-9-2