[H-4-3] Highly Reliable 256Mb NOR Flash MLC with Self-Aligned Process and Controlled Edge Profile

Wook Hyun Kwon、Jung In Han、Bomsoo Kim、Chang-Ki Baek、Sang-Pil Sim、Wook H. Lee、Jee Hoon Han、Cheol Jung、Heon Kyu Lee、Young Kwan Jang、Jeung Hwan Park、Dae Mann Kim、Chan-Kwang Park、Kinam Kim (1.Advanced Technology Development Team, Semiconductor R&D Center, Samsung Electronics Co., LTD.)

https://doi.org/10.7567/SSDM.2005.H-4-3