[P4-1] The New Technology for DRAM Cell Transistor with S-RCAT and its Size Effect

Se Geun Park, Ji Young Kim, Yong Il Kim, Ho Jin Oh, Won Suk Lee, Ji Hye Kim, Sung Eui Kim, Myoung Sub Shim, Kyu Pil Lee, Yong Jik Park, Won Shik Lee, Byoung Il Ryu, Yong Han Roh (1.Samsung Electronics, Advanced Technology Team, 2.CAE Team, 3.SungKyunKwan Univ., School of Information & Communication Engineering)

https://doi.org/10.7567/SSDM.2005.P4-1