[P4-8] A new low temperature APM cleaning process to improve ONO integrity in 0.18μm stacked-gate EEPROM memory

Jing Zhao, Nam Sung Kim, Junsyong Ng, Kumfai Wong, Wenyi Zhang, M. Mukhopadhyay, Dhruva Shukla (1.Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.)

https://doi.org/10.7567/SSDM.2005.P4-8