[P-1-21] Composition Dependence of Work Function in Metal (Ni, Pt)-Germanide Gate Electrodes

Daisuke Ikeno、Kouhei Furumai、Hiroki Kondo、Mitsuo Sakashita、Akira Sakai、Masaki Ogawa、Shigeaki Zaima (1.Nagoya University, Graduate School of Engineering、2.Nagoya University, Center for Cooperative Research in Advanced Science & Technology)

https://doi.org/10.7567/SSDM.2006.P-1-21