[C-2-4] Electrochemical Etching of Ru Film for Bevel Cleaning of BEOL

H. Aoki¹、D. Watanabe¹、N. Ooi¹、J. Jong-Hyeon¹、C. Kimura¹、T. Sugino¹ (1.Osaka Univ., Japan)

https://doi.org/10.7567/SSDM.2008.C-2-4