[D-8-3] Diameter-controlled 2-dimensional Array of Si Nanodisk using Bio-nano-process and Neutral Beam Etching for Realistic Quantum Effect Devices

C. H. Huang¹、M. Igarashi¹、T. Kubota¹、M. Takeguchi²、K. Nishioka³、Y. Uraoka⁴、T. Fuyuki⁴、I. Yamashita^4,5、S. Samukawa¹ (1.Tohoku Univ.、2.NIMS、3.Univ. of Miyazaki、4.NAIST、5.Matsushita Electric Industrial Co., Ltd., Japan)

https://doi.org/10.7567/SSDM.2008.D-8-3