Zn1-xCuxO Films Grown by Remote-plasma-enhanced Metalorganic Chemical Vapor Deposition with Cu(dibm)2

2008 International Conference on Solid State Devices and Materials

Sep 23, 2008 - Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

B. Hu¹, M. Adachi¹, T. Aoshima¹, A. Nakamura¹, J. Temmyo¹ (1.Shizuoka Univ., Japan)